JPS6178537U - - Google Patents
Info
- Publication number
- JPS6178537U JPS6178537U JP16499784U JP16499784U JPS6178537U JP S6178537 U JPS6178537 U JP S6178537U JP 16499784 U JP16499784 U JP 16499784U JP 16499784 U JP16499784 U JP 16499784U JP S6178537 U JPS6178537 U JP S6178537U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- chucking
- suction
- holds
- atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16499784U JPS6178537U (en]) | 1984-10-30 | 1984-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16499784U JPS6178537U (en]) | 1984-10-30 | 1984-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6178537U true JPS6178537U (en]) | 1986-05-26 |
Family
ID=30722860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16499784U Pending JPS6178537U (en]) | 1984-10-30 | 1984-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6178537U (en]) |
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1984
- 1984-10-30 JP JP16499784U patent/JPS6178537U/ja active Pending